Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514969 | Apparatus for reducing the effect of contamination on a rapid thermal process | Mehran Behdjat, Norman L. Tam, Michael S. Liu | 2016-12-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514969 | Apparatus for reducing the effect of contamination on a rapid thermal process | Mehran Behdjat, Norman L. Tam, Michael S. Liu | 2016-12-06 |