Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530623 | Process chamber apparatus, systems, and methods for controlling a gas flow pattern | Nir Merry, Izya Kremerman, Jeffrey C. Hudgens | 2016-12-27 |
| 9429248 | Process chamber gas flow apparatus, systems, and methods | Nir Merry, Karuppasamy Muthukamtchi, Jeffrey C. Hudgens, Penchala N. Kankanala | 2016-08-30 |