Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9429248 | Process chamber gas flow apparatus, systems, and methods | Nir Merry, Chandrakant M. Sapkale, Karuppasamy Muthukamtchi, Jeffrey C. Hudgens | 2016-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9429248 | Process chamber gas flow apparatus, systems, and methods | Nir Merry, Chandrakant M. Sapkale, Karuppasamy Muthukamtchi, Jeffrey C. Hudgens | 2016-08-30 |