Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9353440 | Dual-direction chemical delivery system for ALD/CVD chambers | Zhenbin Ge, Chien-Teh Kao, Mei Chang | 2016-05-31 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9353440 | Dual-direction chemical delivery system for ALD/CVD chambers | Zhenbin Ge, Chien-Teh Kao, Mei Chang | 2016-05-31 |