Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478434 | Chlorine-based hardmask removal | Xikun Wang, Mandar B. Pandit, Mikhail Korolik, Anchuan Wang, Nitin K. Ingle +1 more | 2016-10-25 |
| 9355862 | Fluorine-based hardmask removal | Mandar B. Pandit, Xikun Wang, Mikhail Korolik, Anchuan Wang, Nitin K. Ingle | 2016-05-31 |