Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502215 | Plasma processing apparatus and plasma processing method | Hitoshi Kato, Shigehiro Miura, Chishio Koshimizu, Yohei Yamazawa | 2016-11-22 |
| 9385015 | Transfer chamber and method for preventing adhesion of particle | Junji Oikawa, Hiroyuki Nakayama | 2016-07-05 |
| 9349618 | Substrate processing apparatus | Chishio Koshimizu | 2016-05-24 |
| 9313872 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Chishio Koshimizu, Kazuki Denpoh, Masashi Saito | 2016-04-12 |
| 9253867 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Masashi Saito, Kazuki Denpoh, Chishio Koshimizu | 2016-02-02 |
| 9236226 | Plasma processing apparatus | Takafumi Kimura, Chishio Koshimizu | 2016-01-12 |