Issued Patents 2016
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502215 | Plasma processing apparatus and plasma processing method | Hitoshi Kato, Shigehiro Miura, Jun Yamawaku, Yohei Yamazawa | 2016-11-22 |
| 9500537 | Temperature measurement apparatus and method | Jun Abe, Tatsuo Matsudo | 2016-11-22 |
| 9490105 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Ryuji Ohtani +11 more | 2016-11-08 |
| 9459159 | Heat-flux measuring method, substrate processing system, and heat-flux measuring member | Tatsuo Matsudo | 2016-10-04 |
| 9349618 | Substrate processing apparatus | Jun Yamawaku | 2016-05-24 |
| 9313872 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Kazuki Denpoh, Jun Yamawaku, Masashi Saito | 2016-04-12 |
| 9304050 | Temperature measurement apparatus and method | Jun Abe, Tatsuo Matsudo | 2016-04-05 |
| 9253867 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Masashi Saito, Kazuki Denpoh, Jun Yamawaku | 2016-02-02 |
| 9236226 | Plasma processing apparatus | Jun Yamawaku, Takafumi Kimura | 2016-01-12 |