MS

Masaru Sugimoto

TL Tokyo Electron Limited: 1 patents #252 of 758Top 35%
📍 Nirasaki, OR: #2 of 2 inventorsTop 100%
Overall (2016): #298,199 of 481,213Top 65%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9490105 Plasma processing apparatus and method Akira Koshiishi, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu, Ryuji Ohtani +11 more 2016-11-08