Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490105 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Chishio Koshimizu, Ryuji Ohtani +11 more | 2016-11-08 |
| 9384999 | Plasma etching method and storage medium | Naotsugu Hoshi | 2016-07-05 |
| 9362085 | Charged-particle beam lithographic system | Yoshiaki Takizawa | 2016-06-07 |