Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455133 | Hollow cathode device and method for using the device to control the uniformity of a plasma process | Peter L. G. Ventzek, Lin Xu, Lee Chen | 2016-09-27 |
| 9313872 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Chishio Koshimizu, Jun Yamawaku, Masashi Saito | 2016-04-12 |
| 9253867 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Masashi Saito, Chishio Koshimizu, Jun Yamawaku | 2016-02-02 |