Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530621 | Integrated induction coil and microwave antenna as an all-planar source | Lee Chen | 2016-12-27 |
| 9455133 | Hollow cathode device and method for using the device to control the uniformity of a plasma process | Kazuki Denpoh, Lin Xu, Lee Chen | 2016-09-27 |
| 9396900 | Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties | Barton Lane, Lee Chen, Merritt Funk, Jianping Zhao, Radha Sundararajan | 2016-07-19 |
| 9396955 | Plasma tuning rods in microwave resonator processing systems | Jianping Zhao, Lee Chen, Merritt Funk, Iwao Toshihiko | 2016-07-19 |