Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9396900 | Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties | Lee Chen, Peter L. G. Ventzek, Merritt Funk, Jianping Zhao, Radha Sundararajan | 2016-07-19 |