Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431218 | Scalable and uniformity controllable diffusion plasma source | Jianping Zhao, Lee Chen, Radha Sundararajan | 2016-08-30 |
| 9396900 | Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties | Barton Lane, Lee Chen, Peter L. G. Ventzek, Jianping Zhao, Radha Sundararajan | 2016-07-19 |
| 9396955 | Plasma tuning rods in microwave resonator processing systems | Jianping Zhao, Lee Chen, Iwao Toshihiko, Peter L. G. Ventzek | 2016-07-19 |
| 9301383 | Low electron temperature, edge-density enhanced, surface wave plasma (SWP) processing method and apparatus | Jianping Zhao, Lee Chen, Radha Sundararajan | 2016-03-29 |
| 9288890 | Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma | Lee Chen, Zhiying Chen | 2016-03-15 |