Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431218 | Scalable and uniformity controllable diffusion plasma source | Lee Chen, Radha Sundararajan, Merritt Funk | 2016-08-30 |
| 9396900 | Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties | Barton Lane, Lee Chen, Peter L. G. Ventzek, Merritt Funk, Radha Sundararajan | 2016-07-19 |
| 9396955 | Plasma tuning rods in microwave resonator processing systems | Lee Chen, Merritt Funk, Iwao Toshihiko, Peter L. G. Ventzek | 2016-07-19 |
| 9301383 | Low electron temperature, edge-density enhanced, surface wave plasma (SWP) processing method and apparatus | Lee Chen, Merritt Funk, Radha Sundararajan | 2016-03-29 |