Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431218 | Scalable and uniformity controllable diffusion plasma source | Jianping Zhao, Lee Chen, Merritt Funk | 2016-08-30 |
| 9396900 | Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties | Barton Lane, Lee Chen, Peter L. G. Ventzek, Merritt Funk, Jianping Zhao | 2016-07-19 |
| 9301383 | Low electron temperature, edge-density enhanced, surface wave plasma (SWP) processing method and apparatus | Jianping Zhao, Lee Chen, Merritt Funk | 2016-03-29 |