Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502215 | Plasma processing apparatus and plasma processing method | Hitoshi Kato, Shigehiro Miura, Chishio Koshimizu, Jun Yamawaku | 2016-11-22 |
| 9490105 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2016-11-08 |
| 9351389 | Plasma processing apparatus | — | 2016-05-24 |
| 9313872 | Plasma processing apparatus and plasma processing method | Chishio Koshimizu, Kazuki Denpoh, Jun Yamawaku, Masashi Saito | 2016-04-12 |
| 9293299 | Plasma processing apparatus | — | 2016-03-22 |
| 9275837 | Plasma processing apparatus | Naoki Matsumoto, Masahide Iwasaki, Naohiko Okunishi | 2016-03-01 |
| 9253867 | Plasma processing apparatus and plasma processing method | Masashi Saito, Kazuki Denpoh, Chishio Koshimizu, Jun Yamawaku | 2016-02-02 |