Issued Patents 2016
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D773609 | Return nozzle | Shinya Morita, Masahiro Miyake, Masato Terasaki, Naonori Akae | 2016-12-06 |
| D771772 | Return nozzle | Shinya Morita, Masahiro Miyake, Masato Terasaki, Naonori Akae | 2016-11-15 |
| D771543 | Return nozzle | Shinya Morita, Masahiro Miyake, Masato Terasaki, Naonori Akae | 2016-11-15 |
| 9490105 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2016-11-08 |
| 9418822 | Plasma processing apparatus, plasma processing method and high frequency generator | Kazushi Kaneko, Koji Koyama, Kazunori Funazaki, Hideo Kato, Kiyotaka Ishibashi | 2016-08-16 |
| 9412565 | Temperature measuring method and plasma processing system | Yusuke Yoshida, Ryou Son, Takahiro Senda, Masayuki Kohno | 2016-08-09 |
| 9324542 | Plasma processing method and plasma processing apparatus | Yugo Tomita, Naoki Mihara, Kazuki Takahashi, Michitaka Aita, Jun Yoshikawa +5 more | 2016-04-26 |
| 9316544 | Electronic thermometer and method for manufacturing the same | Gaku Hasegawa, Takanobu Yamauchi, Atsushi Kawano, Yasuo Fujita | 2016-04-19 |
| 9312340 | Group III nitride composite substrate and method for manufacturing the same, laminated group III nitride composite substrate, and group III nitride semiconductor device and method for manufacturing the same | Makoto Kiyama, Keiji Ishibashi, Akihiro Hachigo, Fumitake Nakanishi | 2016-04-12 |
| 9312165 | Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device | Akihiro Hachigo, Keiji Ishibashi | 2016-04-12 |
| 9277637 | Apparatus for plasma treatment and method for plasma treatment | Toshihisa Nozawa, Caizhong Tian, Masaru Sasaki, Naoki Mihara, Kazuki Moyama +1 more | 2016-03-01 |
| 9275837 | Plasma processing apparatus | Yohei Yamazawa, Masahide Iwasaki, Naohiko Okunishi | 2016-03-01 |
| 9263283 | Etching method and apparatus | Takayuki Sekine, Masaru Sasaki, Eiichirou Shinpuku | 2016-02-16 |
| 9263298 | Plasma etching apparatus and plasma etching method | Kazuto Takai, Reika Ko, Nobuyuki Okayama | 2016-02-16 |