Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9324572 | Plasma etching method, method for producing semiconductor device, and plasma etching device | Masaru Sasaki, Masaki Inoue, Yoko Noto | 2016-04-26 |
| 9277637 | Apparatus for plasma treatment and method for plasma treatment | Toshihisa Nozawa, Caizhong Tian, Masaru Sasaki, Naoki Mihara, Naoki Matsumoto +1 more | 2016-03-01 |