Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9324542 | Plasma processing method and plasma processing apparatus | Naoki Matsumoto, Yugo Tomita, Kazuki Takahashi, Michitaka Aita, Jun Yoshikawa +5 more | 2016-04-26 |
| 9277637 | Apparatus for plasma treatment and method for plasma treatment | Toshihisa Nozawa, Caizhong Tian, Masaru Sasaki, Naoki Matsumoto, Kazuki Moyama +1 more | 2016-03-01 |