Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343270 | Plasma processing apparatus | Toshihisa Nozawa, Jun Yoshikawa, Masahiro Yamazaki, Takehisa Saito, Fumihiko Kaji +1 more | 2016-05-17 |
| 9324542 | Plasma processing method and plasma processing apparatus | Naoki Matsumoto, Yugo Tomita, Naoki Mihara, Kazuki Takahashi, Jun Yoshikawa +5 more | 2016-04-26 |