FK

Fumihiko Kaji

TL Tokyo Electron Limited: 1 patents #252 of 758Top 35%
Overall (2016): #399,682 of 481,213Top 85%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9343270 Plasma processing apparatus Toshihisa Nozawa, Jun Yoshikawa, Michitaka Aita, Masahiro Yamazaki, Takehisa Saito +1 more 2016-05-17