Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343270 | Plasma processing apparatus | Jun Yoshikawa, Michitaka Aita, Masahiro Yamazaki, Takehisa Saito, Fumihiko Kaji +1 more | 2016-05-17 |
| 9277637 | Apparatus for plasma treatment and method for plasma treatment | Caizhong Tian, Masaru Sasaki, Naoki Mihara, Naoki Matsumoto, Kazuki Moyama +1 more | 2016-03-01 |