Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378942 | Deposition method and deposition apparatus | Atsutoshi Inokuchi, Shogo MASUDA | 2016-06-28 |
| 9343270 | Plasma processing apparatus | Toshihisa Nozawa, Jun Yoshikawa, Michitaka Aita, Masahiro Yamazaki, Fumihiko Kaji +1 more | 2016-05-17 |