Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418822 | Plasma processing apparatus, plasma processing method and high frequency generator | Kazushi Kaneko, Naoki Matsumoto, Koji Koyama, Hideo Kato, Kiyotaka Ishibashi | 2016-08-16 |
| 9373483 | Plasma processing apparatus and high frequency generator | Kazushi Kaneko, Hideo Kato | 2016-06-21 |
| 9355918 | Method for producing high-purity polycrystalline silicon | Kazuomi Sato, Shuichi Miyao | 2016-05-31 |