Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418822 | Plasma processing apparatus, plasma processing method and high frequency generator | Kazushi Kaneko, Naoki Matsumoto, Koji Koyama, Kazunori Funazaki, Hideo Kato | 2016-08-16 |
| 9237638 | Plasma processing apparatus and substrate processing method | Osamu Morita | 2016-01-12 |