Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412565 | Temperature measuring method and plasma processing system | Yusuke Yoshida, Ryou Son, Takahiro Senda, Naoki Matsumoto | 2016-08-09 |
| 9412607 | Plasma etching method | Tomiko Kamada, Akinori Kitamura, Hiroto Ohtake, Yutaka Osada, Yuji Otsuka +2 more | 2016-08-09 |