Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D773609 | Return nozzle | Shinya Morita, Masahiro Miyake, Masato Terasaki, Naoki Matsumoto | 2016-12-06 |
| 9508546 | Method of manufacturing semiconductor device | Kazuyuki Toyoda, Tadashi Takasaki, Hiroshi Ashihara, Atsushi Sano, Hidehiro Yanai | 2016-11-29 |
| D771543 | Return nozzle | Shinya Morita, Masahiro Miyake, Masato Terasaki, Naoki Matsumoto | 2016-11-15 |
| D771772 | Return nozzle | Shinya Morita, Masahiro Miyake, Masato Terasaki, Naoki Matsumoto | 2016-11-15 |
| 9425075 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Yoshiro Hirose | 2016-08-23 |
| 9401272 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Masato Terasaki, Hideki Horita | 2016-07-26 |
| 9269566 | Substrate processing apparatus | Yoshiro Hirose, Yushin Takasawa, Yosuke Ota | 2016-02-23 |