Issued Patents 2016
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524867 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Satoshi Shimamoto | 2016-12-20 |
| 9520282 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Tsukasa Kamakura, Atsushi Sano, Yugo Orihashi | 2016-12-13 |
| 9508543 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Yugo Orihashi | 2016-11-29 |
| 9487861 | Substrate processing apparatus capable of forming films including at least two different elements | Yushin Takasawa, Hajime Karasawa | 2016-11-08 |
| 9478413 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Atsushi Sano | 2016-10-25 |
| 9478417 | Method of manufacturing semiconductor device for forming film including at least two different elements | Yushin Takasawa, Hajime Karasawa | 2016-10-25 |
| 9472397 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Katsuyoshi Harada | 2016-10-18 |
| 9472391 | Semiconductor device manufacturing method | Satoshi Shimamoto, Atsushi Sano, Tsukasa Kamakura, Takaaki Noda | 2016-10-18 |
| 9460914 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Katsuyoshi Harada, Atsushi Sano | 2016-10-04 |
| 9460916 | Method of manufacturing semiconductor device and substrate processing apparatus | Satoshi Shimamoto, Yugo Orihashi, Yoshitomo HASHIMOTO | 2016-10-04 |
| 9460911 | Method of manufacturing semiconductor device and substrate processing method | Atsushi Sano, Yugo Orihashi, Yoshitomo HASHIMOTO, Satoshi Shimamoto | 2016-10-04 |
| 9455137 | Method of manufacturing semiconductor device | Yushin Takasawa, Tsukasa Kamakura, Yoshinobu Nakamura, Ryota Sasajima | 2016-09-27 |
| 9449813 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Atsushi Sano, Tsukasa Kamakura | 2016-09-20 |
| 9443718 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Katsuyoshi Harada, Atsushi Sano | 2016-09-13 |
| 9443720 | Method of manufacturing semiconductor device for forming film including at least two different elements | Yushin Takasawa, Hajime Karasawa | 2016-09-13 |
| 9443719 | Method of manufacturing semiconductor device for forming film including at least two different elements | Yushin Takasawa, Hajime Karasawa | 2016-09-13 |
| 9437422 | Method of manufacturing semiconductor device and substrate processing method | Atsushi Sano | 2016-09-06 |
| 9431240 | Method of manufacturing semiconductor device | Atsushi Sano, Katsuyoshi Harada, Satoshi Shimamoto | 2016-08-30 |
| 9425075 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Naonori Akae | 2016-08-23 |
| 9412584 | Method of manufacturing a thin film having a high tolerance to etching and non-transitory computer-readable recording medium | Atsushi Sano | 2016-08-09 |
| 9396929 | Method of manufacturing a semiconductor device, substrate processing apparatus and recording medium | Norikazu Mizuno, Kazutaka Yanagita, Katsuko Higashino | 2016-07-19 |
| 9390911 | Method of manufacturing semiconductor device | Ryota Sasajima, Yoshinobu Nakamura, Ryuji Yamamoto | 2016-07-12 |
| 9390916 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Kenichi Suzaki | 2016-07-12 |
| 9384961 | Method for manufacturing semiconductor device, method for processing substrate, substrate processing apparatus and recording medium | Ryuji Yamamoto | 2016-07-05 |
| 9385013 | Method and apparatus of manufacturing a semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |