Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520282 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Tsukasa Kamakura, Atsushi Sano, Yugo Orihashi | 2016-12-13 |
| 9472397 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Atsushi Sano | 2016-10-18 |
| 9460914 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Yoshiro Hirose, Atsushi Sano | 2016-10-04 |
| 9443718 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Yoshiro Hirose, Atsushi Sano | 2016-09-13 |
| 9431240 | Method of manufacturing semiconductor device | Yoshiro Hirose, Atsushi Sano, Satoshi Shimamoto | 2016-08-30 |