Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524867 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose | 2016-12-20 |
| 9478413 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Yoshiro Hirose, Atsushi Sano | 2016-10-25 |
| 9472391 | Semiconductor device manufacturing method | Yoshiro Hirose, Atsushi Sano, Tsukasa Kamakura, Takaaki Noda | 2016-10-18 |
| 9460916 | Method of manufacturing semiconductor device and substrate processing apparatus | Yugo Orihashi, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2016-10-04 |
| 9460911 | Method of manufacturing semiconductor device and substrate processing method | Yoshiro Hirose, Atsushi Sano, Yugo Orihashi, Yoshitomo HASHIMOTO | 2016-10-04 |
| 9431240 | Method of manufacturing semiconductor device | Yoshiro Hirose, Atsushi Sano, Katsuyoshi Harada | 2016-08-30 |
| 9355866 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Atsuhiko Suda, Naofumi Ohashi | 2016-05-31 |
| 9349586 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2016-05-24 |