Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508546 | Method of manufacturing semiconductor device | Kazuyuki Toyoda, Tadashi Takasaki, Atsushi Sano, Naonori Akae, Hidehiro Yanai | 2016-11-29 |
| 9418855 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Kimihiko NAKATANI, Kazuhiro Harada | 2016-08-16 |
| 9368358 | Method of manufacturing a semiconductor device | Kazuhiro Harada, Arito OGAWA, Motomu DEGAI, Masahito Kitamura | 2016-06-14 |
| 9349586 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Tsukasa Kamakura +1 more | 2016-05-24 |