Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425039 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Arito OGAWA | 2016-08-23 |
| 9418855 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Kimihiko NAKATANI, Hiroshi Ashihara | 2016-08-16 |
| 9368358 | Method of manufacturing a semiconductor device | Arito OGAWA, Motomu DEGAI, Masahito Kitamura, Hiroshi Ashihara | 2016-06-14 |