Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508555 | Method of manufacturing semiconductor device | Yukinao KAGA, Atsuro SEINO, Atsuhiko Ashitani, Ryohei Maeno, Masanori Sakai | 2016-11-29 |
| 9472637 | Semiconductor device having electrode made of high work function material and method of manufacturing the same | Sadayoshi Horii, Hideharu Itatani | 2016-10-18 |
| 9437704 | Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same | Sadayoshi Horii, Hideharu Itatani | 2016-09-06 |
| 9425039 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kazuhiro Harada | 2016-08-23 |
| 9406520 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium | Tsuyoshi Takeda | 2016-08-02 |
| 9378964 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium | Tsuyoshi Takeda | 2016-06-28 |
| 9368358 | Method of manufacturing a semiconductor device | Kazuhiro Harada, Motomu DEGAI, Masahito Kitamura, Hiroshi Ashihara | 2016-06-14 |
| 9355850 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium | Tsuyoshi Takeda | 2016-05-31 |