Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523150 | Substrate processing apparatus, method for manufacturing semiconductor device and computer-readable recording medium | — | 2016-12-20 |
| 9472637 | Semiconductor device having electrode made of high work function material and method of manufacturing the same | Sadayoshi Horii, Arito OGAWA | 2016-10-18 |
| 9437704 | Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same | Sadayoshi Horii, Arito OGAWA | 2016-09-06 |