Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518321 | Atomic layer deposition processing apparatus to reduce heat energy conduction | Mitsuro Tanabe, Yoshihiko YANAGISAWA, Kazuhiro Yuasa, Yasutoshi TSUBOTA | 2016-12-13 |
| 9508555 | Method of manufacturing semiconductor device | Yukinao KAGA, Arito OGAWA, Atsuro SEINO, Atsuhiko Ashitani, Ryohei Maeno | 2016-11-29 |
| 9509333 | Compression device, compression method, decompression device, decompression method, information processing system, and recording medium | Masahiro Kataoka, Takafumi Ohta | 2016-11-29 |
| 9472398 | Method of manufacturing semiconductor device and substrate processing apparatus | Tatsuyuki Saito, Yukinao KAGA, Takashi Yokogawa | 2016-10-18 |
| 9466477 | Method of manufacturing semiconductor device, substrate processing apparatus, and semiconductor device | Tatsuyuki Saito, Yukinao KAGA, Takashi Yokogawa | 2016-10-11 |
| 9416446 | Semiconductor device manufacturing method and substrate processing apparatus | Tatsuyuki Saito, Yukinao KAGA, Takashi Yokogawa | 2016-08-16 |
| 9340873 | Semiconductor device manufacturing method and substrate processing apparatus | Tatsuyuki Saito, Yukinao KAGA, Takashi Yokogawa | 2016-05-17 |
| 9238257 | Method of manufacturing semiconductor device, cleaning method, and substrate processing apparatus | Yukinao KAGA, Takashi Yokogawa, Tatsuyuki Saito | 2016-01-19 |