Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472398 | Method of manufacturing semiconductor device and substrate processing apparatus | Tatsuyuki Saito, Masanori Sakai, Yukinao KAGA | 2016-10-18 |
| 9466477 | Method of manufacturing semiconductor device, substrate processing apparatus, and semiconductor device | Tatsuyuki Saito, Masanori Sakai, Yukinao KAGA | 2016-10-11 |
| 9416446 | Semiconductor device manufacturing method and substrate processing apparatus | Tatsuyuki Saito, Masanori Sakai, Yukinao KAGA | 2016-08-16 |
| 9340873 | Semiconductor device manufacturing method and substrate processing apparatus | Tatsuyuki Saito, Masanori Sakai, Yukinao KAGA | 2016-05-17 |
| 9238257 | Method of manufacturing semiconductor device, cleaning method, and substrate processing apparatus | Masanori Sakai, Yukinao KAGA, Tatsuyuki Saito | 2016-01-19 |