Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508555 | Method of manufacturing semiconductor device | Arito OGAWA, Atsuro SEINO, Atsuhiko Ashitani, Ryohei Maeno, Masanori Sakai | 2016-11-29 |
| 9472398 | Method of manufacturing semiconductor device and substrate processing apparatus | Tatsuyuki Saito, Masanori Sakai, Takashi Yokogawa | 2016-10-18 |
| 9466477 | Method of manufacturing semiconductor device, substrate processing apparatus, and semiconductor device | Tatsuyuki Saito, Masanori Sakai, Takashi Yokogawa | 2016-10-11 |
| 9416446 | Semiconductor device manufacturing method and substrate processing apparatus | Tatsuyuki Saito, Masanori Sakai, Takashi Yokogawa | 2016-08-16 |
| 9340873 | Semiconductor device manufacturing method and substrate processing apparatus | Tatsuyuki Saito, Masanori Sakai, Takashi Yokogawa | 2016-05-17 |
| 9263269 | Reaction tube, substrate processing apparatus and method of manufacturing semiconductor device | Satoshi Okada, Kosuke Takagi | 2016-02-16 |
| 9238257 | Method of manufacturing semiconductor device, cleaning method, and substrate processing apparatus | Masanori Sakai, Takashi Yokogawa, Tatsuyuki Saito | 2016-01-19 |