Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9263269 | Reaction tube, substrate processing apparatus and method of manufacturing semiconductor device | Satoshi Okada, Yukinao KAGA | 2016-02-16 |
| D748578 | Adapter plate | Takaaki Noda | 2016-02-02 |
| D748594 | Reaction tube | Satoshi Okada | 2016-02-02 |
| D748056 | Adapter plate | Takaaki Noda | 2016-01-26 |