Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530641 | Method for manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima, Jie Wang | 2016-12-27 |
| 9514935 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and program | Takeo Hanashima | 2016-12-06 |
| 9472391 | Semiconductor device manufacturing method | Satoshi Shimamoto, Yoshiro Hirose, Atsushi Sano, Tsukasa Kamakura | 2016-10-18 |
| 9349586 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2016-05-24 |
| 9263251 | Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus | Norikazu Mizuno, Tomohide Kato | 2016-02-16 |
| D748578 | Adapter plate | Kosuke Takagi | 2016-02-02 |
| D748056 | Adapter plate | Kosuke Takagi | 2016-01-26 |