Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9396929 | Method of manufacturing a semiconductor device, substrate processing apparatus and recording medium | Yoshiro Hirose, Kazutaka Yanagita, Katsuko Higashino | 2016-07-19 |
| 9343290 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Kazutaka Yanagita, Shingo Okubo | 2016-05-17 |
| 9334567 | Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus | Yoshiro Hirose, Kenji Kanayama, Yushin Takasawa, Yosuke Ota | 2016-05-10 |
| 9263251 | Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus | Tomohide Kato, Takaaki Noda | 2016-02-16 |