SO

Shingo Okubo

HE Hitachi Kokusai Electric: 1 patents #74 of 172Top 45%
LC L'Air Liquide, Societe Anonyme Pour L'Etude Et L'Exploitation Des Procedes Georges Claude: 1 patents #45 of 168Top 30%
📍 Tsukuba, JP: #117 of 379 inventorsTop 35%
Overall (2016): #228,703 of 481,213Top 50%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9343290 Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Yoshiro Hirose, Norikazu Mizuno, Kazutaka Yanagita 2016-05-17