Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9396929 | Method of manufacturing a semiconductor device, substrate processing apparatus and recording medium | Yoshiro Hirose, Norikazu Mizuno, Katsuko Higashino | 2016-07-19 |
| 9343290 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Norikazu Mizuno, Shingo Okubo | 2016-05-17 |