Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9334567 | Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus | Yoshiro Hirose, Kenji Kanayama, Norikazu Mizuno, Yushin Takasawa | 2016-05-10 |
| 9269566 | Substrate processing apparatus | Naonori Akae, Yoshiro Hirose, Yushin Takasawa | 2016-02-23 |