Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530641 | Method for manufacturing semiconductor device, substrate processing apparatus, and recording medium | Jie Wang, Takaaki Noda | 2016-12-27 |
| 9514935 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and program | Takaaki Noda | 2016-12-06 |
| 9349586 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Yoshiro Hirose, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2016-05-24 |