Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520282 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshiro Hirose, Atsushi Sano, Yugo Orihashi | 2016-12-13 |
| 9472391 | Semiconductor device manufacturing method | Satoshi Shimamoto, Yoshiro Hirose, Atsushi Sano, Takaaki Noda | 2016-10-18 |
| 9455137 | Method of manufacturing semiconductor device | Yoshiro Hirose, Yushin Takasawa, Yoshinobu Nakamura, Ryota Sasajima | 2016-09-27 |
| 9449813 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Atsushi Sano, Yoshiro Hirose | 2016-09-20 |
| 9378943 | Method of manufacturing semiconductor device, method of processing substrate substrate processing apparatus and non-transitory computer-readable recording medium | Yoshiro Hirose, Yushin Takasawa, Yoshinobu Nakamura, Ryota Sasajima | 2016-06-28 |
| 9349586 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara +1 more | 2016-05-24 |