Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520282 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshiro Hirose, Tsukasa Kamakura, Atsushi Sano | 2016-12-13 |
| 9508543 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Yoshiro Hirose | 2016-11-29 |
| 9460911 | Method of manufacturing semiconductor device and substrate processing method | Yoshiro Hirose, Atsushi Sano, Yoshitomo HASHIMOTO, Satoshi Shimamoto | 2016-10-04 |
| 9460916 | Method of manufacturing semiconductor device and substrate processing apparatus | Satoshi Shimamoto, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2016-10-04 |
| 9412587 | Method of manufacturing semiconductor device, substrate processing apparatus, gas supply system, and recording medium | Atsushi Moriya, Naoharu Nakaiso, Kotaro Murakami | 2016-08-09 |