Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412587 | Method of manufacturing semiconductor device, substrate processing apparatus, gas supply system, and recording medium | Naoharu Nakaiso, Yugo Orihashi, Kotaro Murakami | 2016-08-09 |
| 9255011 | Method for producing lithium carbonate | Masanobu Kawata, Hirohumi Tanaka, Kohei Mitsuhashi, Ryo Kawarabuki, Youichi Yamamoto +2 more | 2016-02-09 |