Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437426 | Method of manufacturing semiconductor device | Kazuhiro Yuasa, Yuki Kitahara | 2016-09-06 |
| 9412587 | Method of manufacturing semiconductor device, substrate processing apparatus, gas supply system, and recording medium | Atsushi Moriya, Yugo Orihashi, Kotaro Murakami | 2016-08-09 |