Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518321 | Atomic layer deposition processing apparatus to reduce heat energy conduction | Mitsuro Tanabe, Yoshihiko YANAGISAWA, Masanori Sakai, Yasutoshi TSUBOTA | 2016-12-13 |
| 9437426 | Method of manufacturing semiconductor device | Naoharu Nakaiso, Yuki Kitahara | 2016-09-06 |