Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518321 | Atomic layer deposition processing apparatus to reduce heat energy conduction | Mitsuro Tanabe, Yoshihiko YANAGISAWA, Kazuhiro Yuasa, Masanori Sakai | 2016-12-13 |
| 9472424 | Substrate processing apparatus and a method of manufacturing a semiconductor device | Katsuyoshi Hamano, Masayuki Tomita, Teruo Yoshino | 2016-10-18 |
| 9236246 | Substrate processing apparatus and a method of manufacturing a semiconductor device | Katsuyoshi Hamano, Masayuki Tomita, Teruo Yoshino | 2016-01-12 |